Combines hypergravity mass transfer with precision filtration to remove trace metals and particles down to the parts-per-trillion (ppt) level.
Stable production of SEMI G5 grade chemicals.
Low-temperature, inert atmosphere operation prevents the formation of peroxides (in Acetone/THF) and inhibits H2O2 decomposition.
Extends chemical shelf life and ensures fab safety.
Utilizes ultra-high purity polished 316L Stainless Steel or Hastelloy with electropolished surfaces (Ra < 0.2µm) to eliminate metal leaching.
Zero secondary pollution design.
From cathode coating to electrolyte filling, we provide total solvent management.
Recovery and purification of NMP, PGMEA, PGME from photoresist and strip processes for re-use as electronic-grade solvent.
Photoresist
NMP / PGMEA
Electronic Grade
Regeneration of developer/stripper solvents and blends to control organic load and extend bath life.
Developer
Stripper
Bath Life
Recovery of IPA, acetone and other cleaning solvents from tool cleaning and drying lines.
Cleaning
IPA / Acetone
Solvent Loops
Deep dehydration of ethyl lactate and glycol ethers for advanced lithography and cleaning steps.
Dehydration
Specialty Solvents
Low Moisture
Recovery of NMP, DMF and glycol-ether solvents from PCB, FPC and display coating and cleaning lines.
PCB / FPC
Display
Solvent Recovery
Concentration and conditioning of solvent-rich rinse and strip solutions before biological treatment or external disposal.
High-COD
Wastewater
Side Streams
Solvent / Stream | Typical Source in Electronics / Semiconductors | Key Issues / Pollutants | VHPS Treatment Goal | Example Performance | |
NMP, PGMEA, PGME | Photoresist coating, baking and strip processes | Metals, water, organics, color bodies | Recover to electronics-grade solvent for reuse | Purity ≥ 99.8%; water ≤ 100 ppm; recovery ≥ 98–99% | |
Ethyl lactate & glycol ethers | Advanced lithography and cleaning steps | Moisture, degradation, narrow spec window | Deep dehydration, low degradation, stable lithography performance | Very low water (ppm level); stable resist behavior | |
IPA, acetone, MEK, MIBK | Wafer, panel, PCB/FPC cleaning and drying lines | Water, COD, mixed impurities | Recover and dehydrate cleaning solvents for internal loops | Purity ≥ 99.9%; water in ppm range; recovery ≥ 95–99% | |
Developer & stripper solutions | Lithography development and resist stripping | High COD, organic load, changing composition | Regenerate solvent blend, cut COD and extend bath life | COD reduction 30–60%; longer bath lifetime | |
Solvent-rich rinse & strip wastewater | Rinse, strip and cleaning steps around lithography/tools | High COD, solvent content, color | Concentrate and recover solvents, reduce load to WWTP | Volume reduction 50–80%; COD reduction 30–60% | |
High-COD / fluorinated waste streams | Etch, clean and specialty processes | Fluorinated organics, high COD, difficult biodegradability | Pre-concentrate and condition for downstream treatment or disposal | Volume reduction; improved treatability downstream | |
PCB / FPC coating & cleaning solvents | PCB, FPC, display backplane production | Solvent loss (NMP, DMF, glycol ethers), VOC emissions | Recover solvents for reuse, lower VOC and fresh-solvent consumption | Solvent recovery ≥ 98–99%; VOC load reduced | |
Tool cleaning / maintenance solvent mixes | Off-line tool cleaning, maintenance and flushing | Mixed solvents, high COD, variable composition | Recover reusable fraction, reduce waste and external treatment costs |
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Discover why industry leaders trust us to solve their most complex separation challenges.
Yes. VHPS hypergravity distillation can be designed with high-purity materials, low hold-up and tight control of water and metals, allowing many solvents (such as NMP, PGMEA, IPA) to meet electronic-grade specs for reuse.
VHPS systems for electronics use stainless or higher-grade alloys, clean piping design and appropriate filtration, and can be integrated with existing polishing filters to maintain low particles and low metals in recovered solvents.
In typical photoresist solvent recovery, NMP/PGMEA loops and solvent-rich wastewater services, VHPS heat-pump distillation can reduce energy use by about 30–50% versus conventional columns or evaporators.
VHPS is supplied as a compact skid installed in utility areas or solvent recovery rooms. It connects to existing tanks and headers as a side-stream unit, so you can upgrade solvent recovery with minimal impact on fab tools.
